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产品详细
| 项目ltem | 规格spec |
| 设备外形尺寸 (Equipment dimension) | 2500x2500X2800 |
| 抛光盘直径 (Disc diameter) | 900mm |
| 抛光头数量 (Number of polishing head) | 3PCS |
| 吸附盘直径 (Adsorption disc diameter) | 420mm |
| 吸附盘数量 (Number of adsorption disks) | 12PCS |
| 单次抛光数量 (Number of polishing in one time ) | 63PCS |
| 下盘转速 (Footwall of speed) | 0~22 rpm |
| 上抛光盘转速 (Upcast disc speed) | 0~270 rpm |
| 气源压力 (Air pressure) | 0.5-0.6Mpa |
| 真空负压 (Vacuum negative pressure) | ≤-0.08 Mpa |
| 设备总功率 (Total equipment power) | 28kw |
| 设备重量 ( Equipment weight） | ≈6500kg |
